Creation of high-performance thin films and nanomaterials

By precisely controlling deposited particles at the atomic and molecular level, it becomes possible to form unprecedented thin-film crystalline phases and design complex film structures. This opens up new possibilities for film structures that break away from the conventional concept of single-layer film structures, enabling the realization of seemingly contradictory physical and mechanical properties of thin films, such as achieving both high hardness and high toughness.

Manufacturing technology field

The surface properties required for cutting tools and press dies are becoming increasingly stringent year by year. To achieve a surface that does not wear even when subjected to high surface pressure in high-temperature environments exceeding 1000°C, a new concept that breaks away from conventional film structure designs is required. Our laboratory has been conducting research and development on thin films, mainly hard nitride thin films, aiming to form highly tough films that have excellent heat resistance and wear resistance even in high-temperature environments.

Electronic and semiconductor device field

Technological innovation in electronic and semiconductor devices, which form the foundation of modern industry, has been supported by the miniaturization of wiring technology in large-scale integrated circuits. As we move into the 7nm generation, many challenges remain in achieving further miniaturization, and the challenges in the constituent elemental technologies must be resolved. To date, our laboratory has developed a technology for depositing high-melting-point thin film materials at low temperatures, which was previously difficult, and is conducting research and development aimed at improving the thermal stability of fine wiring materials and diffusion-blocking films.

Medical device field

Magnesium alloys are attracting attention as bioabsorbable materials that combine excellent biodegradability with the strength characteristic of metals, making them ideal for use in medical implants. As clinical trials progress, mainly in Europe, there is an urgent need to develop technologies to control the biodegradation rate according to the implantation site and type of disease. While development of material composition and microcrystalline structure control technologies is progressing, methods for controlling the degradation rate through surface treatment are also expected. Our laboratory has focused on magnesium oxide films and has been conducting research on their corrosion properties under simulated biological environments.

Environmental and energy technology fields

The growing awareness of global environmental and energy issues is accelerating the efforts toward achieving the Sustainable Development Goals by 2030. Thin films and nanomaterials play a crucial role in this technological development. Our laboratory has been conducting research and development on electrolyte materials for thin-film solid fuel cells, primarily oxide thin films, and nanoparticle catalyst materials for hydrogen energy generation.