Tokyo Metropolitan University, Faculty of Systems Design, Department of Mechanical Systems Engineering
Research Topics
Aiming to design processes based on plasma analysis and create novel thin-film materials and nanomaterials.
This laboratory was newly established in 2020, separating from the Advanced Materials Processing Laboratory (Yang Laboratory) of the Department of Mechanical Systems Engineering, Tokyo Metropolitan University. Building upon our previous research on surface design and surface function creation in mechanical systems, we have contributed to numerous industrial fields through innovative thin-film process development. For further details, please see below.
Thin-film process development and application research using high-density pulsed plasma
We are developing high-performance thin-film processes that leverage the process control flexibility of high-power pulsed sputtering (HiPIMS) technology, which was developed in the early 2000s. By understanding the transient plasma characteristics in pulsed plasma, we can achieve control of ion particles in the plasma, which was previously difficult.
High-performance thin films
Creation of nanomaterials
By precisely controlling deposited particles at the atomic and molecular level, it becomes possible to form unprecedented thin-film crystalline phases and design complex film structures. This opens up new possibilities for film structures that break away from the conventional concept of single-layer film structures, enabling the realization of seemingly contradictory physical and mechanical properties of thin films, such as achieving both high hardness and high toughness.
Creation of functional surfaces through microtexturing
Creating functional surfaces requires not only designing thin film materials but also establishing design guidelines for geometric factors, including surface properties. With the recent advancements in precision machining technologies, such as laser processing, "surface texturing technology" is attracting attention. Our laboratory is researching the functional properties of surface geometric factors related to lubrication-free friction characteristics by achieving microtexturing of thin film materials, with the major goal of reducing environmental impact and realizing oil-free manufacturing technology.